Brooks Marathon Express - Heating Control

6. Operation Marathon Express
Heating System Part Number: 605914 Rev. B
Thesinglezonetemperatureatthethermocouplemaybemonitoredandaveragedbythehost
controller.Ifthesetpointtemperatureisnotreachedinaspecifiedamountoftime,analarmshould
bepostedtoindicatetheoperationhastimedout.
BakeoutHeating
BakeoutHeatingmodeisusedafterservicehasbeenperformedontheTransportChamber.
Heatingisperformedduringpumpdown.Thismodeisusedtoachievealowbasepressureby
liberatingwatervaporfromthechambersurfaces.
DuringBakeoutHeatingthetemperatureoftheTransportChamberisraisedtoagiven,veryhigh
temperatureforafixedamountoftime;thentheheatisturnedoff.DuringBakeout,theTransport
Chambermustbeatvacuum.Themaximumbakeouttemperatureis120°C(248°F).
Nomaterialhandlingorprocessingispermittedduringbakeout(robotmustnotmove).
ContinuousHeating
ContinuousHeatingmodeisusedtopreventdepositionofchambergasesoncoldchamber
surfaces.Heatingisperformedcontinuously.
WheneverthetoolisoperatingthetemperatureoftheTransportChamberisraisedtoahigh
temperature.Thetooloperatesnormallyduringthistime,includingtransferringmaterialtoandfrom
cassettes.Themaximumcontinuousheatingtemperatureis50°C(122°F).
ChamberCooling
ThechambercoolingisbytheabsenceofheatcombinedwiththecoolingoftheMXVacuumBack
Endchamberwithforcedwater.Theuseofnon-corrosivewaterat15°C±5°Cisrecommendedfor
cooling.Thereisnospecificcoolingfeatureassociatedwiththeheateritself.See"WaterCooling
Systems"onpage132.
Heating Control
Controloftheheateristhroughtheuser’shostcontroller.
StartaHeatingProcess
Forabakeoutheatingprocess,theheatingshouldbestoppedaftertheuserdeterminedheating
duration.Thechambertemperatureisthencooledtothecooltemperaturesetpointspecifiedbythe
user(typically25°C(77°F))beforereturningtheMXsystemintoservice.
NOTE: Thechambershouldnotbeventedduringabakeoutprocess.
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