Brooks Marathon Express - Page 131

Brooks Automation 6. Operation
Part Number: 605914 Rev. B Heating System
Foracontinuousheatingprocess,heatingstopsonlywhencommandedbythehostcontroller
(processabort,EMO,etc.).Thechamberisonlycooledtothecooltemperaturesetpointspecified
bytheuser(typically25°C(77°F))forservicingtheMXsystem.

Extreme Temperature
Surfacesheatedduringsystembake-outcanreachtemperaturesof121°C(250°F),
whichcouldcausesburnswhenincontactwithskin.

Oncesystemheatinghasbeenstarted,allpersonnelmustkeepawayfromthesystemto
avoidpossibleburninjuryduetohightemperatures.

AllowtimefortheMarathonExpresstocoolbeforeservicingoroperating.

DoNOToperatetherobot,vacuumaligner,oranyothercomponentsintheMarathon
ExpressSystemduringbakeout.

Step Action
1.
Removeallmaterialfromthetopsurfaceofthesystem(includingtherobot’sCDM,tools,andpaperor
plasticparts.
2.
Ventthesystem.
3.
RemoveallmaterialfromtheVCEs,TransportChamber,etc.
4.
RemovetheTopCoolercosmeticcoverandfastener.
5.
EnsurethatthetopandsidesurfacesofTransportChamberincludingtheLidandLidLifterassemblies
arecoveredwiththecustomfitreusablethermalinsulationblankets.
6.
TurnontheHeaterPowerSupplybyswitchingtheMainCircuitBreaker(Control)toon.
VerifytheREADYlightonthefrontpanelislit.
7.
Pumpdownallchambers(VCEs,TransportChamber,etc.)tohighvacuum.
8.
PreparetheTopCooler:
a. PumpdowntheTopCoolerbyopeningtheTopCoolerRoughValve.
b. Afterpumpdowniscomplete,closetheTopCoolerRoughValve.
c. OpentheTopCoolerPoppetValve.Thepoppetwillstayopenforthedurationofthebake-out
cycle.ThisconditionisnecessarytopreventtheCoolChucko-ringfromstickingtothepoppet
surface.
Copyright © 2023, Brooks Automation, Inc.
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