Brooks Marathon Express - Vacuum System Troubleshooting

Brooks Automation 10. Troubleshooting
Part Number: 605914 Rev. B Pressure/Indicator Switch
Pressure/Indicator Switch
ErrorsoftheDigitalPressureSwitcharedisplayedontheLCD.Afterlocatingandsolvingthe
problem,pressRESET tocleartheerror.
Display Problem Solution
E1dE Datasettingshavechanged. PressRESET andsetalldataagain.
E2CE1 Output1:Loadisshorted;overcurrent. Turnoffpower.Examinepowersupply.
E2CE2 Output2:Loadisshorted;overcurrent. Turnoffpower.Examinepowersupply.
E3PE
Forpositivepressure:1.5xratedpressureis
applied.
Setthepressurelessthantheratedpres-
sure.
Table 10-3: Digital Pressure Switch Troubleshooting
Vacuum System
ThissectioncoversdeterminationofproblemswithintheVacuumSystem.
Problem Corrective Action
Vacuumchamberdoesnotpumpdownina
normalmanner(lessthan0.0001torrwithin
fiveminutes.
l
Ensurethatthevacuumchamber’svacuumgaugeis
calibratedandisfunctioningproperly.
l
Checkforcontaminantsonsubstrates,materialsupport
assemblies,orinchamber.
l
Ensurethatthevacuumchamber’spumpcontrolleris
functioningproperly.Resetitifnecessary.Refertothe
PumpControllerUserManual.
l
Ensurethatthevacuumchamber’spumpstackisolation
valveisfunctioningproperly(airpressureisokay).
l
Checkvacuumchamber’sslotvalvesealstoensurethey
arestillinplace,freeofdebris,andinworkingorder.
l
Checkthevacuumchamber’sbackingpumpsystem.
l
Performaleakcheckifallabovefails;isolatepossible
leaks.
Table 10-4: Vacuum System Troubleshooting
Copyright © 2023, Brooks Automation, Inc.
205