Brooks Marathon Express - Material Presence Sensors; Magnatran 7 or LEAP Vacuum Robot; Control;Display Module

Brooks Automation 4. Subsystems
Part Number: 605914 Rev. B Material Presence Sensors
Figure 4-10: Integral Wafer Buffer Station
Material Presence Sensors
Tosafeguardagainstmaterial-handlingmishaps,theMarathonExpressTransportChamber
containsopticalmaterialsensorsateachstation.RefertotheSystemBlockDiagram,controls
manual,andappropriaterobotusermanualforsetup.Therobotsensesthematerialon-the-fly
duringPICK,PLACE,GOTO,andXFERoperations.
MagnaTran 7 or LEAP Vacuum Robot
Refertotheappropriaterobotusermanualformoreinformation.
Control/Display Module
Refertotheappropriaterobotusermanualformoreinformation.
WhentheTeachPendantisnotpluggedinitmustberemovedfromtheareawheretheMarathon
ExpresssystemislocatedtoavoidtheattempteduseoftheE-Stopduringanemergency.
Copyright © 2023, Brooks Automation, Inc.
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