Brooks Marathon Express - Interlocks Troubleshooting; Material Transport Troubleshooting

10. Troubleshooting Marathon Express
Interlocks Part Number: 605914 Rev. B
Symptom Possible Problem Area
Wafernotcooling TopCooler
Systemnotheatingduringbake-out HeatingSystem
Pressureswitchnotrespondingcorrectly "Pressure/IndicatorSwitch"
Chambernotpumpingdowncorrectly "VacuumSystem"
Slotvalve/Atmosphericdoornotworkingproperly "IsolationValveReplacement"
Interlocks
Seethecontrolsmanualformoreinformation.
Material Transport
ThissectioncoversdeterminationofproblemswithintheMaterialTransportSubsystems.
Symptom Corrective Action
Materialslippingonendeffector
1.Checkthatvacuumisconnectedandmeetspressurespe-
cifications.
2.Verifythatrobotapplicationnumberiscorrectforthearm
set/endeffector(contactBrooksTechnicalSupport)
Materialisleftontheendeffector.Materialmust
beplacedbackintoaLoadLockoraProcessMod-
ule.
1.Identifycauseofthefailurethatleftthematerialontheend
effector.
2.PutthematerialbackintothedesiredModuleusingthe
robot’sCDM.
Materialisleftontheendeffector.Corrective
actionsoutlinedabovefailed
1.Shutdownthesystemandrecovermanually.
2.Removethevacuumchamber’slidandcheckallcom-
ponentsassociatedwiththefailure.Manuallyremovethe
material.
Table 10-2: Material Transport Troubleshooting
TopLigner Vacuum Aligner
Formoreinformation,seethealignermanual.
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