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Brooks Marathon Express - Transport Chamber Heating System

Brooks Marathon Express
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4. Subsystems Marathon Express
Water System Part Number: 605914 Rev. B
Water System
TheMarathonExpressframeassemblyincludesanoptionalwaterfacilitiesinterface.Thisprovides
aconnectionfortheClusterTooltowatersuppliedbythefacilityforcoolingofthechamber,pumps,
andanyothersystemcomponentsthatrequirecoolingwater,suchastheTopCooler.Locatedinthe
framebelowtherobot,theWaterFacilitiesInterfaceiseasilyaccessibleforservice.
Thewatercoolingsystemrequiresaclosedloopcoolingsourcecapableofsupplyingchilledwater
asspecifiedin"FacilitiesSpecifications"onpage21.Theminimumpressureof20psiisrequiredto
ensurethatthewaterinsidetheTransportChamberdoesnotboilwhenthechamberisheatedto
120°C.Thesupplypressuremustbe30psigreaterthanreturnpressuretoachieverequiredflow
rateduringchambercooldownafterbakeout.
Figure 4-4: Water Facilities Connection Panel
RefertotheSystemBlockDiagramandWaterDiagramsuppliedwiththismanual.
Transport Chamber Heating System
AnoptionalsinglezonevacuumchamberheatingsystemmaybeprovidedwiththeMarathon
Express.HeatingtheTransportChamberremovesfreewatermoleculesattachedtothechamber
wallsallowingalowerbasevacuumtobeobtained.ThermalBlanketsareprovidedtominimizeheat
lossprovidingafasterbakeoutcycle.
TheElectricHeatingSystemconsistsofaHeaterPowerSupply,HeaterCartridgeassemblies
mountedintheTransportChamber,aTemperatureController,aThermalSwitch,anda
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Copyright © 2023, Brooks Automation, Inc.

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