Brooks Marathon Express - Vacuum System Operation

6. Operation Marathon Express
Vacuum System Operation Part Number: 605914 Rev. B
Vacuum System Operation
ThefollowingvacuumsystemoperationexampleisforaPVDsystemconfigurationcontainingturbo
pumpedloadlocksandcryopumpandcryopanelontheTransportChamber.
Initial Conditions
l
Systemisventedwithallchambersatatmosphericpressure.
l
Roughandforelinepumpsareoperatingwithmanifoldpressureof<100mT.
l
Coolingwatersuppliedtothesystemiswithinspecification.
l
DC/ACpowersupplyisavailabletoallsystemloads.
l
HostControllerisbootedandready.
l
Heliumcompressorisreadyandoperating,cryogenicpumpsareatroomtemperature.
l
Allsystemvalvesareshut.
Chamber Bakeout
a. StopcoolingwatertoTransportChamber.
b. EnergizeTCCartridgeHeaters.
c. RoughouttheTransportChamber.
a. Openslowrough.
b. Atcrossover(80Torr)openfastroughandshutslowrough.
d. Roughloadlock.
a. Openturbopumpforelineisolationvalveandstartturbopump.
b. Openslowrough.
c. Atcrossover(80Torr)openfastroughandshutslowrough.
d. Whenturboisatfullspeed,openturboisolationandenergizethehighvacuumgauge.
e. RepeatforsecondLoadLock.
f. Roughcryopumpandbegincooldown.
g. Whencooldowniscomplete,opencryopumpisolationvalveandenergizehighvacuumgauge.
h. Afterchamberbakeoutiscomplete,secureCartridgeHeatersandinitiatecoolingwaterflowto
chamber.
Start-up
a. Begincooldownofcryopanel.
b. Whencryopanelisatoperatingtemperatureandchamberpressureis<1x10-7,systemisreadyfor
processing.
Exchange Wafers in the Load Locks
a. VenttheLoadLock.
a. CloseLoadLockslotvalve.
b. Closeturbopumpisolationvalve.
c. De-energizethehighvacuumgauge.
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