Brooks Marathon Express - Chamber Isolation Valves; Venting System

Brooks Automation 4. Subsystems
Part Number: 605914 Rev. B Vacuum Systems
terminatedatasinglepointKF-40connectionundertheLoadLocks.Theroughplumbingmanifold
fortheTransportChamberisterminatedataKF-40connectionunderthechamber.
Chamber Isolation Valves
Isolationvalvesareusedtoisolatethechambersofthesystemfromvacuumsystemcomponentsor
otherchambers.AllcontrolandmonitoringoftheisolationvalvesisdonethroughtheI/O
communicationslinkwiththehostcontroller.Foranoverviewoftheisolationvalvecablingand
control,refertotheSystemBlockDiagramandVacuumandVentDiagramssuppliedwiththis
manual.
VacuumIsolationValves
TheLoadLocksandTransportChambervacuumsystemsincludeavalvelocatedbetweenthe
LoadLockchamberortheTransportChamberandtheirrespectivemainpump.Thisvalveisused
toisolatethechamberfromthemodule’svacuumsystemduringchamberventcyclesandwhenthe
vacuumsystemisnotoperating.
TransferIsolationValves
TheMarathonExpressissuppliedwithTransferIsolationValves(SlotValves)locatedbetweenthe
TransportChamber,theLoadLocks,andtheProcessModules.Thesevalvesareusedtoisolate
theTransportChamberfromtheLoadLockchambersduringventcycles(loadandunload
operations)andtoisolatetheTransportChamberfromtheenvironmentallycontrolledProcess
Modulesduringmaterialprocessing.Slotvalvespermitthechambertoremainatvacuumwhile
hostileenvironmentalconditionsoccurwithinProcessModulesduringmaterialprocessing.Slot
Valvesarecontrolledbythehostcontroller.
ExternalvacuumslotvalvesarelocatedbetweentheProcessModulesandtheVacuumTransport
Chamber.ThisisolatestheprocessgaseswiththeProcessModuletopreventcontaminationofthe
environmentwithintheVacuumTransportChamber.TheseslotvalvesaremountedtotheVacuum
TransportChamberwiththeseatsideagainstthechamber.Theseatsidehasasealandis
indicatedbythepointingofthetrianglestampedontheflange.
ExternalvacuumslotvalvesarelocatedbetweentheLoadLocksandtheVacuumTransport
Chamber.ThisallowstheVacuumTransportChambertomaintainavacuumwhiletheLoadLockis
ventedformaterialtransfer.
ExternalatmosphericdoorsarelocatedbetweentheSmallVolumeLoadLockandtheuser’s
EFEM.ThisallowsaccesstotheLoadLockwhenitisventedformaterialtransfer.
Venting System
TheMarathonExpressusestwostageventingthroughafilterandadiffuser.TheTransport
Chamberusesafixedorificeventvalve,whichiseitheropenorclosed,asmaterialshouldnotbe
Copyright © 2023, Brooks Automation, Inc.
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