Brooks Marathon Express - Maintenance Procedure

9. Maintenance and Repair Marathon Express
Cleaning Procedure Part Number: 605914 Rev. B
TheMarathonExpressmaybeusedinanenvironmentwherehazardousmaterials
arepresent,andsurfacesmaybecontaminatedbythosematerials.Refertothe
facility’sMaterialSafetyDataSheetsforthosematerialstodetermineproper
handlingandfollowthefacility’sprocedurestocertifytheenvironmentissafe.

Disposeofcleaningclothsperthefacility’sproceduresandlocalregulations.

Lockout / Tagout
Workingwithenergizedequipmentmaycausesuddenmovementorelectricalshockand
mayresultindeathorseriousinjury.
l
Allenergymustberemovedfromtheequipmentperthefacility’s
Lockout/Tagoutprocedurebeforeservicing.
l
Iflocalproceduresarenotavailable,followtheprocedureforLockout/Tagoutin
OSHA Standard 29CFR 1910.147.

Maintenance Procedure
Step Action
1.
HOMEtherobotthenturnoffanddisconnectallpower,communications,andairconnectionsas
detailedin"Shut-down"onpage1.
2.
Cleaning the Load Lock:
a. Removethecassetteandallwafersfromtheloadlockchamber.
b. ForaVCE,cleanthesurfaceoftheCassettePlatformandtheinterioroftheloadlockusingthe
GeneralCleaningProcedureinStep4.
c. ForanSVL,cleanthesurfacesofallmaterialshelvesandtheinterioroftheloadlockusingthe
GeneralCleaningProcedureinStep4.
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