Brooks Marathon Express - Procedure

8. System Alignment Marathon Express
Teach the Robot the Process Modules Part Number: 605914 Rev. B
ProcedureCategory
Type2Procedure:Equipmentisenergizedandallenergizedcircuitsarecoveredorinsulated.All
workisperformedremotelyusingtheCDMorservicecomputer.
RequiredTools
l
Control/DisplayModule
l
MicroToolDummyWaferortestmaterialoftheappropriatesize
AlignmentStrategy
Fortheprocedureprovidedbelow,thefollowingconfigurationisassumed:
l
FirstProcessModuleonleft-handsideisStation2fortherobot
Procedure
Automatic Movement / Crush hazard
WheneverpowerisappliedtotheMarathonExpress,thepossibilityexistsofautomatic
movementthatcancauseseriousinjuryordeath.Thesecomponentsinclude:
l
Robot
l
Aligner
l
CoolModulePoppet
l
LoadLockModule(s)(AutoDoor,Arm,Platform)
l
AtmosphericDoors
l
VacuumSlotValves
l
IsolationValves
l
Pumps
Movingmechanismsdonothaveobstructionsensorsandcancauseseriouspersonal
injuryordeath.

DonotoperatetheMarathonExpresswithouttheprotectivecoversinplaceandall
safetyinterlocksenabled.

Donotoperatetherobotwithouttheprotectivecoversinplace.

DonotoperatetheVacuumSlotValvesorAtmosphericDoorswhenthechamberlidis
open.

AlwaysverifyproperoperationoftheCDME-Stopbuttonbeforeperforminganyteachproceduresbypressingthe
E-Stopbuttonandverifyingthatthearmisnolongerpoweredandthatwhilethebuttonisdownnomotion
commandsareaccepted.
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