Brooks Marathon Express - Electrical System

Brooks Automation 4. Subsystems
Part Number: 605914 Rev. B Electrical System
Figure 4-9: Chamber Cooling System
ForMXsystemsthathavetheoptionalTopCoolerwafercoolerinstalledcoolingwaterisroutedto
theCoolTraytoprovidewafercooling.RefertotheVXTopCoolerUserManual.
ForMXsystemsthatrequirecoolingformodulessuchaspumpsthecoolingwaterisroutedfromthe
waterfacilitiespaneltothemodulesrequiringcooling.
Thewatercoolingsystemrequiresaclosedloopcoolingsourcecapableofsupplyingchilledwater
ataminimumpressureof20psi.Thisminimumpressureisrequiredtoensurethatthewaterinside
theTransportChamberdoesnotboilwhenthechamberisheatedto120°Cduringbakeoutbythe
ElectricHeatingsystem.Thesupplypressuremustbe30psigreaterthanreturnpressureto
achievetherequiredflowrateduringchambercooldownafterbakeout.
TheMarathonExpresswatercoolingsystemutilizesthesameequipmentinallMXsystemswiththe
onlydifferencebeingthedifferentcoolingloadsassociatedwiththevariouscoolingoptions.
Electrical System
RefertotheSystemBlockDiagramsuppliedwiththismanualforthespecificsystem.
Copyright © 2023, Brooks Automation, Inc.
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