Brooks Marathon Express - EMO Circuit

Brooks Automation 3. Installation
Part Number: 605914 Rev. B Installation Procedure
EMO Circuit
Step Action
1.
TheEMOcircuitistheresponsibilityoftheuser.AnoptionalEMObuttonmaybesuppliedwiththesys-
temfortheuser’sconvenience.
2.
OncetheEMOcircuitiswiredandtested,removetheWarninglabelfromtheoptionalEMObutton.

Pneumatic
AirisconnectedtotheMarathonExpressforoperationoftheVacuumCassetteElevators,Slot
Valves,AtmosphericDoors,andoptionalTopCooler.Quickconnectairportsareprovidedonthe
MarathonExpresssystem’sPneumaticFacilitiesPanel.Referto"FacilitiesSpecifications"onpage
21forpneumaticrequirements.Ensurethatthepneumaticconnectionisfortheappropriate
pressure.
DonotturnonthepneumaticsupplyuntilallconnectionstotheMarathonExpressandallinstallationprocedures
havebeencompleted.

Figure 3-9: Pneumatic and Water Connections
Copyright © 2023, Brooks Automation, Inc.
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