Brooks Marathon Express - Page 76

3. Installation Marathon Express
Installation Procedure Part Number: 605914 Rev. B
Step Action
1.
Connectthecompressedairlinefromthefacilitytothe10mmquickconnectairconnectiononthe
MarathonExpresssystem’sPneumaticFacilitiesPanel.

Nitrogen
NitrogenisconnectedtotheMarathonExpressforventingtheVacuumCassetteElevatorsandthe
MarathonExpressVacuumBackEndand,dependingontheconfiguration,nitrogenmaybeused
asthethermaltransfergasintheTopCooler.A1/4inchVCRconnectionisprovidedontheMX
systemontheGasFacilitiesPanel.Referto"FacilitiesSpecifications"onpage21fornitrogengas
requirements.Ensurethatthenitrogenconnectionisfortheappropriatepressure.
DonotturnonthenitrogensupplyuntilallconnectionstotheMarathonExpressandallinstallationprocedures
havebeencompleted.
Figure 3-10: Gas and Vacuum Connections
Step Action
1.
ConnectthenitrogenlinefromthefacilitytothenitrogenconnectionontheMXsystemasshowninFig-
ure3-5onpage71.
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