Brooks Marathon Express - Vacuum Measurement System; Gauges; Vacuum System Control; Pneumatic System

4. Subsystems Marathon Express
Pneumatic System Part Number: 605914 Rev. B
presentduringventing,thereforeparticulateredistributionisnotaconcern.TheLoadLockuses
two-stagefixedorificeventingbecauseofpossiblematerialpresence.However,fullycontrollable
soft-ventingisavailableintheLoadLockchambersifdesired.
TominimizeparticulateredistributionduringtheLoadLockchamberventcycle,boththetwo-stage
fixedorificeandthevariableflowventingsubsystemsemployacontrolledflowofnitrogentovent
theevacuatedchamber.
VentSystem
TheMarathonExpresshighvolumeventsystemprovideslessthanoneminuteventcycling.
Constructionisofelectropolishedstainlesssteeltubingwithweldedfittingsandnobends.Adigital
pressuregaugeisprovidedtomonitorventgaspressure.
Vacuum Measurement System
Thevacuummeasurementsystempermitsthehostcontrollertomonitorandcontrolpressurein
eachenvironmentallycontrolledchamberduringevacuationandventingcycles.Foreach
evacuatedchamber,thesystemconsistsofavacuummeasurementcontroller,oneortwolow-
vacuumgaugeheadsandahigh-vacuumgaugehead.
VacuumMeasurementController
ThevacuummeasurementsystemincludesVacuumMeasurementControllerslocatedinthesmart
gaugesthatinterpretsignalsfromthegaugeheadsandcommunicatewiththehostcontroller.
Gauges
Highvacuumsystemsusingturbopumpsorcryopumpsrequiregaugestomonitorthevacuum
pressurefromatmospheredownto5x10-8Torrregion.Twotypesofvacuumgaugesareusedon
theMXsystem:MicroIonandMini-Convectron.
Vacuum System Control
VacuumSystemcontrolresideswiththehostcontroller.Duringventingandevacuationcycles,
eachVacuumMeasurementControllermonitorspressurelevelsinitsrespectivechambertoassure
propertimingofventandevacuateoperations.
Pneumatic System
CompressedairisusedtopowervariousvalveswithintheMarathonExpresssystem’svacuum
systems.ThePneumaticSystemalsoprovidescontrolandroutingofcompressedairforcontrolof
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