Brooks Marathon Express - Communications Connections

3. Installation Marathon Express
Installation Procedure Part Number: 605914 Rev. B
Exhaust
AlinetoreceiveexhaustfromoperationoftheMarathonExpressisconnectedtotheVacuum
CassetteElevatorsandMarathonExpressVacuumBackEnd.One8mmquickconnectexhaust
portisprovidedontheMarathonExpresssystem’sPneumaticFacilitiesPanel.Referto"Facilities
Specifications"onpage21forexhaustrequirements.
Step Action
1.
Connecttheexhaustlinefromthefacilitytothe10mmquickconnectEXHconnectionontheMarathon
Expresssystem’sPneumaticManifold.
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WaterandDrain
DependingupontheconfigurationoftheMarathonExpress,watermayneedtobesuppliedtothe
MXsystemforcoolingofcomponentsattachedtothechamber,suchaspumps,orforthecoolingof
thevacuumchamber.Referto"FacilitiesSpecifications"onpage21forwateranddrain
requirements.Ensurethatthewaterconnectionisfortheappropriatepressureandtemperature
andismaintainedtoavoidcorrosion.
DonotturnonthewaterconnectionuntilallconnectionstotheMarathonExpressandallinstallationprocedures
havebeencompleted.

TheseconnectionsareonlyrequiredifthesystemrequirescoolingwaterfortheTransportChamber
ormodulesattachedtothesystem.
Step Action
1.
Runa1/2inchO.D.TeflonlinefromthefacilitywatersupplytotheWATERconnectionontheMara-
thonExpresssystem’sFacilitiesInterfacePanel.
2.
Runa1/2inchO.D.TeflonlinefromthefacilitywaterdraintotheRETURNconnectionontheMara-
thonExpresssystem’sFacilitiesInterfacePanel.
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Communications Connections
ThemoduleswithintheMarathonExpresstypicallyuseRS-232,RS-422,RS-485,DiscreteI/O,
Ethernet,andDeviceNetforcommunicationswiththehostcontrollerr.Somemodules,suchasthe
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