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Brooks Marathon Express - Standard Operation; Temperature Controller

Brooks Marathon Express
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6. Operation Marathon Express
Heating System Part Number: 605914 Rev. B
TheMainHeaterCableconnectstheHeaterPowerSupplytotheMainHeaterHarnesslocatedon
thechamber.TheHeaterHarnessbranchespowertotheHeaterCartridgeassemblies,the
TemperatureController,theThermalSwitch,andtheThermocouple.
TheHeaterControlPowerSupplyiscapableoftwomodesofoperation:Standard,whereitwill
operatefromtheFrontPanelonly,andRemote,wherebasiccontrolsandindicatorsforthepower
supplyareavailablebothfromaremotelocationandfromtheFrontPanel.
Standard Operation
EnsurethatthesuppliedjumperplugisinstalledintheREMOTEconnectorontherearofthepower
supply.
RemoteOperation
ARemoteControlInterfaceandCablemustbecreatedandconnectedtotheREMOTEconnector
ontherearofthepowersupplywiththeappropriateremoteswitchesandindicators.
Mounttheremotecontrolinterfacewhererequired.Thepowersupplycannowbeturnedonoroff
andmonitoredfromeithertheremotelocationorfromthefrontpanelofthepowersupply.
Function Condition
ManualStop Alwaysworks
ManualStart WorksonlywhentheRemoteOffcircuit(pins1&6)isclosed.
Table 6-6: Heater Power Supply Remote Operation Conditions
Formoreinformationonoperatingtheheatersystem,referto"TemperatureController"andthe
HeaterControllerWiringDiagram,SystemBlockDiagram,andVacuumandVentDiagrams
suppliedwiththismanual.
Temperature Controller
TheTemperatureControllermonitorstheset-pointsprogrammedintoit,monitorsthetemperature
oftheTransportChamberduringtheheatingoperation,andcommandstheHeaterPowerSupplyto
controlpowertoCartridgeHeatersduringtheheatingoperation.
TheTemperatureController(WatlowSeriesSD6,showninFigure6-10)islocatedintheLower
FacilitiesoftheTransportChamberframe.TheTemperatureControllerisadualdisplaycontroller.
Thereisoneuniversalsensorinput,asecondauxiliaryinput,andtwooutputs.Thecontroller
provides6.5Hzsampling,variabletimebaseburstfiringoutputs,NEMA4Xfrontpaneland0.1%
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Copyright © 2023, Brooks Automation, Inc.

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