Brooks Marathon Express - Supplementary and Related Documentation

Brooks Automation 1. Introduction
Part Number: 605914 Rev. B Supplementary and Related Documentation
Level1-MarathonExpressComponents:
ThisisthebaseMarathonExpresssystemprovidingonlytheautomationcomponentsand
mechanicalintegration.ThissystemincludestheTransportChamber,Frame,andFullAutomation
ComponentSetasdetailedbelow.
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Transportchamberandframe
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VCEvacuumloadlockswithmanualdoor
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Vacuummaterialhandlingrobotdrive,transferarm,andendeffector(s)
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Systemdocumentation
Level2-MarathonExpresswithVacuumSystem
ThislevelofintegrationprovidesaVacuumPumpingSystem,includingVentingandFacilities.This
systemincludesallcomponents,integration,andtestingforacompleteMechanicalsolution.Level
2includesthecompletecomponentsetfromLevel1andfacilitiesplumbingasdetailedbelow.
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AllLevel1items
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Facilitiessubsystems,includingnitrogen,air,andwater
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ApplicationspecificVacuum/Ventsubsystemsincludingcommonroughingandventingsystem,hard
vacuumlines,vacuummanifolds,valves,andgauges
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HighVacuumpumps(ifrequired)
Level2.5-MarathonExpresswithElectricalIntegration
ThislevelofintegrationprovidescompleteElectricalIntegration,includingControlsWiringand
SystemPower.Thissystemincludesallcomponents,integration,andtestingforacomplete
Controlssolution.Level2.5providesacompletecomponentsetincludingallcablingandcomplete
PowerDistributionasdetailedbelow.
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AllLevel2items
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Connectorpanelwithinternalwiringandpowerdistribution
Supplementary and Related Documentation
ThisusermanualprovidesdocumentationforoperationandmaintenanceoftheBrooksAutomation
MarathonExpressClusterToolIntegrationPlatform.Whilethisdocumentcoversspecific
informationandadjustmentsfortheMarathonExpress,theremaybeinformationinothermanuals
whichaffectthesettingsoroperatingmodeoftheMXsystemandtheattachedcomponents.
TheMarathonExpressissettosystemspecificationsandacceptancetestedatBrooksAutomation.
BeforeadjustingorchangingsettingsonaMarathonExpress,consultthefollowingdocumentation:
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BrooksAutomationrobotmanuals
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BrooksAutomationVCEUserManual
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OEMComponentsManuals(suppliedwiththismanual)
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ProcessModuleUserManual
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ProcessModuleControllerUserManual
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TransportControllerUserManual
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Copyright © 2023, Brooks Automation, Inc.
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