Brooks Marathon Express - Teach the Robot to the TopLigner Vacuum Aligner

Brooks Automation 8. System Alignment
Part Number: 605914 Rev. B Alignment Procedures
Crush Hazard
OperatingthevacuumrobotwiththeTransferChamberLidremovedexposestheuserto
movinghazards.

Donotclimbintothechamberorleavetoolsonthefloorofthechamber.

Donotputhandsintothechamberwhenmotionisinprogress.
Alignment Procedures
Thefollowingalignmentprocedureswillprovidetheinformationrequiredforstandarduser
alignmentoftheBrooksAutomationMarathonExpress.Forafullsystemalignmentfollowthe
"SystemAlignment"onpage141.
Setting the Options for the Vacuum Robot
Seetheappropriaterobotusermanualformoreinformation.
Teach the Robot to the TopLigner Vacuum Aligner
IftheMarathonExpressisequippedwiththeoptionalBrooksAutomationTopLignerdrop-inaligner,
itisnecessarytoteachtherobotthestationlocationofthealignerchuck.Thisstationshouldbeset-
upbeforeanyProcessModulesasitwillbeusedtofine-tunetheirset-up.
NOTE: Thestationsreferencedhereareforastandardconfiguration.Actualstation
assignmentsmayvarybasedonthesystemconfiguration.
Changingstationassignmentsmaycauseinterlockstobeignored.Changingthe
stationnumbersrequiresreconfigurationofallstationoptions.
TheVacuumAlignerstationmustbetaughtpriortoteachinganyotherstations.
Procedure Category
Type2Procedure:Equipmentisenergizedandallenergizedcircuitsarecoveredorinsulated.All
workisperformedremotelyusingtheCDMorservicecomputer.Referto"LaserHazards"onpage
46.
Copyright © 2023, Brooks Automation, Inc.
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