Brooks Marathon Express - Installing the Marathon Express

Brooks Automation 3. Installation
Part Number: 605914 Rev. B Installation Procedure
Step Action
3.
Unscrewthearmshippingbrackets.Removethebracketsandsaveforfutureuse.IftheMarathon
ExpressVacuumBackEndisshipped,thebracketsmustbereplacedbeforeshipping.
4.
Lowerthelidandsecureallmountingbolts.
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VCEModule(s)
ThedoorandthecassetteplatformofeachVCEaresecuredinplaceforprotectionduring
shipment.TheseshippingbracketsmustberemovedbeforeattemptingtooperatetheVCEs.Refer
totheVCEUserManualfordetailedinstructionsonremovingtheshippingbrackets.
Step Action
1.
RemovethebracketssecuringthedoortotheframeoftheVCE.
2.
RemovethebracketsecuringthecassetteelevatorplatformtothebackwalloftheVCEchamber.
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Installing the Vacuum Cassette Elevators
TheVCE6LoadLocksaretypicallymountedatthefactoryandnotremovedforshipping.
Installing the Marathon Express
TheMarathonExpressmustbepositionedwithinthefacilitytoensureproperhandoffbetweenthe
facilitywafercarriersandtheVacuumCassetteElevators.OncetheMXsystemispositioneditmust
beleveledandtheMaterialTransportPlanemustbeadjustedtotheproperheight.Afterthese
preliminaryadjustmentsarecompletetheMXsystemmaybeboltedtothefloorusingthetie-down
pointsprovided.
LevelingtheMarathonExpressandSettingtheMaterialTransportPlane
AdjustablefeetareprovidedontheframeoftheMarathonExpress.Thesefeetareusedtosupport
theMarathonExpressVacuumBackEndandVCEs,tosettheMaterialTransportPlane(MTP),and
tocompensateforanunevenfloor.
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Copyright © 2023, Brooks Automation, Inc.
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