Brooks Marathon Express - System Preparation

8. System Alignment Marathon Express
System Preparation Part Number: 605914 Rev. B
Teach the Robot the Buffer Station Location
AnoptionalBufferStationisavailablewithintheMarathonExpresssystem’sVacuumBackEndand
requiresprecisemovementoftherobotwithinit.Toensureproperhandoffofthematerialbetween
therobotandtheBufferStationthestation’slocationmustbetaughttotherobot.Referto"Teach
theRobottheIntegralWaferBufferStation"onpage165forinstructionsonteachingtheBuffer
Station.
Teach the Robot the Process Module Locations
TheProcessModulesattachedtotheMarathonExpressprovidetheactualprocessingofthe
materialandrequirepreciseplacementofthematerialwithinthem.Toensureproperhandoffofthe
materialbetweentherobotandtheProcessModulesthePMstationsmustbetaughttotherobot.
Referto"TeachtheRobottheProcessModules"onpage167forinstructionsonteachingthePM
stations.
VerifyProperOperationoftheMaterialPresenceSensors
OncethemodulesoftheMarathonExpresshavebeenproperlyalignedthesensorswithinthe
systemmustbealignedforproperoperation.
Step Action
1.
VerifyproperoperationoftheMaterialPresenceSensors.
VerifyProperOperationoftheMarathonExpress
OncethemodulesoftheMarathonExpresshavebeenproperlyalignedtheoperationofthesystem
mustbeverified.
Step Action
1.
VerifypropermaterialtransferbetweenallstationswithintheMarathonExpress.Referto"System
AlignmentCheck-out"onpage171.
System Preparation
Ifpreparingforalignmentafterinstallation,powerupandinitializetheMarathonExpressas
specifiedin"Installation".
Ifpreparingforanalignmentafterreplacingacomponentorperforminganalignmentcheck,first
ensurethattheTransportChamber,theVacuumCassetteElevators,andanyProcessModule
chambersarevented.
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