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Brooks Marathon Express - Heaters

Brooks Marathon Express
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4. Subsystems Marathon Express
Transport Chamber Heating System Part Number: 605914 Rev. B
Heaters
UptonineHeaterCartridgeassemblies,showninFigure4-6,arepositionedaroundthebottomof
theTransportChamberasshowninTable4-1.EachHeaterCartridgeismadeintoasub-assembly
forquickreplacement,refertoTable4-1forspecificpowerratings.AThermocoupleattachedtothe
TransportChambermonitorstheTCtemperatureandaThermalSwitchprovidesover-temperature
protection.
Figure 4-6: Cartridge Heater Assembly
System Heater Type Location of Use Quantity
MX600
1220W@240VAC
900W@240VAC
Japan,USA
Europe
8
8
MX700
1220W@240VAC
900W@240VAC
Japan,USA
Europe
8
8
MX800
1000W@240VAC
750W@240VAC
Japan,USA
Europe
9
9
Table 4-1: Cartridge Heater Styles
94
Copyright © 2023, Brooks Automation, Inc.

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