Brooks Marathon Express - Laser Hazards

2. Safety Marathon Express
Laser Hazards Part Number: 605914 Rev. B
Disconnect Devices
TheintegratorandenduserareresponsiblefortheMarathonExpresssystem’smaindisconnect
device,ensuringthatitisreadilyaccessibleandcomplieswiththecorrectelectriccodes.Themain
userinstalleddisconnectdevicemustmeet,orexceed,theminimumAICratingspecifiedbySEMI
S2.PersonnelservicingtheMarathonExpresssystemandanyequipmentconnectedtoitare
responsibleforthestatusofthesystem’smaindisconnectdeviceasspecifiedbythefacilities’
lockout/tagoutprocedure.
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BeforedisconnectingmainpowertotheMarathonExpress,ensureallcircuitbreakersontheMarathonExpress
systemandanyrelatedequipmentareintheOFFposition.Damagetointernalcomponentsmayresultifcircuit
breakersareleftintheONposition.
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Laser Hazards
TheBrooksAutomationMarathonExpressuseslowpowerlaserlightformappingofwafersandto
ensureallwafersareproperlyseatedinthecassetteintheVCE.Theselasersproducelowpower
invisibleinfraredlight.TheyareClassIIlaserdiodes.TheselasersareClassIasimplemented
becausetheyarenotvisibleduringnormaloperation.
Theproperprecautionsforoperatingandservicinglasersmustbeobserved.Anyprecautions
specifiedwithinthefacilitywheretheMarathonExpressisbeingusedmustalsobeobserved.
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