Brooks Marathon Express - Water Cooling Systems

6. Operation Marathon Express
Water Cooling Systems Part Number: 605914 Rev. B
Step Action
9.
SettheBakeouttemperature.BrooksAutomationrecommends120°C(248°F)forthetemperature
setpoint.
10.
Determinethebaketime.BrooksAutomationrecommends80hoursafterinitialbuild,installation,or
afterserviceperiodswhentheTransportChamberisopenedtoatmosphereforgreaterthan1hour.
11.
Startthebakeoutcycle.

AbortaHeatingProcess
Theabortprocessisuserconfigured.Itshouldonlybeconsideredcompletewhenthetemperature
reachesthecooltemperaturesetpoint.
Water Cooling Systems
TheremaybeuptothreewatercoolingsystemswithintheMarathonExpress,basedonthe
configurationofthesystem.Onewatercoolingsystemisusedintherapidcool-downprocessofthe
chamberafterchamberheating.Anothercoolingsystemisusedforthepumpsandanyother
systemcomponentsthatrequirewatercooling.Anothercoolingsystemprovidescoolingofhot
wafersbeforetheyarereturnedtotheloadlocksforstorageinacassette.
Figure 6-11: Water Distribution Panel
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