Brooks Marathon Express - Adjust the Load Lock Platform

Brooks Automation 8. System Alignment
Part Number: 605914 Rev. B Vacuum Cassette Elevator Configuration and Alignment
Step Action
2.
Usingtherobot’sCDM,movetherobot’sarmoutoftheLoadLock’saccessslot.
SETUP -> STATIONS -> 1 -> CR -> LEARN R, T, BTO -> HAND LOCATE

a. Movetherobot’sarmwiththewaferoutoftheaccessslotandexituseofthevacuumrobot
usingtheCDM.
QUIT
3.
Removethewaferfromtheendeffectorandthegaugeblockfromtheaccessslot.
4.
RefertoTable8-1andassignacalculatedvalueforthelift/lower(Z)movetoLWR(lower).

Wafer Size Lower Value
100mm,125mm,150mm(4in,5in,6in) 1.82mm(0.072in)
200mm(8inch) 2.25mm(0.089in)
Table 8-1: VCE Lower Values

Adjust the Load Lock Platform
TheplatformofeachLoadLockattachedtothesystemmustbeadjustedsothatwhentherobot’s
endeffectorisextended,andintheUPposition,awaferontheendeffectorwillbecentered
verticallyinthecurrentlypresentedcassetteslot.
NOTE: AllcassettesusedwithinLoadLocksattachedtotheMarathonExpressmust
meetSEMIMESCstandards.
Step Action
1.
SettheplatformoftheLoadLocktoacceptthecassettetypethatwillbeused(refertotheBrooksAuto-
mationVCEUserManualforadjustments).
2.
HometheLoadLock.

00, A, HM
NOTE: Donot“home”theelevatorwhiletherobot’sarmsorendeffectorareextendedintotheLoad
Lock’schamberasseveredamagemayresult.
Copyright © 2023, Brooks Automation, Inc.
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