Brooks Marathon Express - Page 160

8. System Alignment Marathon Express
Vacuum Cassette Elevator Configuration
and Alignment
Part Number: 605914 Rev. B
Step Action
1.
Usingtherobot’sCDM,movetherobot’span’A’endeffectortotheappropriateLoadLock’saccess
slot.

SETUP -> STATIONS -> 1 -> CR -> LEARN R, T, BTO -> HAND LOCATE
a. Manuallymovetherobot’sendeffectoruntiltheendeffectorislocatedinsidetheaccessslotas
shown.
b. Placethegaugeblockintheaccessslot,adjacenttotherobot’sendeffectorwiththe1.279inch
dimensionvertical,asshown.
c. Placeawaferontheendeffectorandsightalongthebottomofthewafer.Thebottomofthe
wafershouldalmosttouchthetopofthegaugeblockwhenrestingontheendeffector(moving
thegaugeblockshouldnotcausethewafertomove).IftheBTOvalueneedsadjustmentjogto
theappropriateheight,andstorethecorrectedBTOvalue.
d. OncetheendeffectorispositionedcorrectlysavetheBTOvaluefortherobotusingtheCDM.
ESCAPE -> STORE -> BTO -> QUIT
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