Brooks Marathon Express - Start-Up

6. Operation Marathon Express
Start-up Part Number: 605914 Rev. B
a. CloseIsolationvalve.
b. CloseallRoughvalves.
c. CloseallVentvalves.
d. Checkifpressureislessthanventcrossoversetpoint.
e. InitiateProfilevent.
a. Ifnitrogenisnotpresent:raiseexception,postalarm.
b. Openprofileventvalve.
c. Waitforprofileventtime.
d. Ifpressureislessthanorequaltocrossover:raiseexception,postalarm.
f. InitiateFastvent.
a. Ifnitrogenisnotpresent:raiseexception,postalarm.
b. OpenFastventvalve.
c. Closeprofiledventvalve.
d. Ventchambertoatmosphere.
e. Ifswitchnotatatmosphereandtimehasexpired:raiseexception,postalarm.
g. Ifnitrogenisnotpresent:raiseexception,postalarm.
h. CloseFastventvalve.
Start-up
TheMarathonExpressClusterToolisstartedbyapplyingpowerandplantfacilitiesaspreviously
specified.Oncethisisdone,theMarathonExpressisreadytooperateandwillacceptcommands
overthecommunicationsline.
NOTE: Allswitchsettings,communicationsconnections,powerconnections,and
facilitiesconnectionsshouldbemadebeforepowerisapplied.
ThissectiondescribestherecommendedprocedureforpoweringuptheBrooksAutomation
MarathonExpressClusterToolIntegrationPlatformundernormalcircumstances.
Step Action
1.
Verifythatalloftheinstallationprocedurespreviouslyoutlinedhavebeencompleted.
2.
Ensurethatallswitchsettingsaresetaccordingtotheinstructions.
3.
Turnonthecircuitbreakers.Thestatuslightsshouldcomeonasindicatedin"Power-upSequence"on
page79.
4.
Iftheinitializationsequenceexecuteswithouterror,thenallthecomponentsarereferenced,theCas-
setteModulesareatslot#0,thehostcontrollerhasnotdetectedanysubstratesontheendeffector(s),
andallthecomponentsarecommunicatingsuccessfully.

NormaloperationoftheBrooksAutomationMarathonExpressiscontrolledbytheuser’shost
controller.Normaloperationwouldtypicallyproceedasfollows:
138
Copyright © 2023, Brooks Automation, Inc.