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Brooks Marathon Express - Vacuum Robot, Arm, or End Effector Replacement

Brooks Marathon Express
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9. Maintenance and Repair Marathon Express
Repair Procedures Part Number: 605914 Rev. B
Procedure
Step Action
1.
a. Ensurethechamberlidisclosedandsecuredwiththefullcomplementofscrews.Ensurethe
setscrewsareretractedfromthelid.
b. Removethefourscrewsandwasherssecuringthelifterarmstothechamberlid,andfourmore
securingtheliftermechanismtothechamber
c. Removethelidliftermechanism.
d. Removethespacerslocatedunderthelifterarms.
2.
Ensurethechamberlidisclosedandsecuredwiththefullcomplementofscrews.Ensuretheset
screwsareretractedfromthelid.
3.
Locatethelifterarmspacersonthechamberlid
4.
RemovetheshippingbracketfromtheLidLifterarms.
5.
Installtheliftermechanismensuringallmountingholeslineupwiththeholesonthechamberlids.
6.
Installthefourscrewsandwasherssecuringthelifterarmstothechamberlid,andfourmoresecuring
theliftermechanismtothechamber.Tightenallmountingboltsuntilthelockwashersarefullyseated;
thentightentheboltsanadditional1/4turn.
Vacuum Robot, Arm, or End Effector Replacement
Thevacuumrobot,arm,andendeffectorareavailableasFRUsandhavenouserserviceable
parts.TheseFRUscanbereplacedusingthefollowingprocedure.
ProcedureCategory
Type1Procedure:Equipmentisfullyde-energized.
196
Copyright © 2023, Brooks Automation, Inc.

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