Brooks Marathon Express - Operation Guide; Theory of Operation

Brooks Automation 6. Operation
Part Number: 605914 Rev. B Theory of Operation
6. Operation
ThischapterprovidescompleteoperationinstructionsfortheBrooksAutomationMarathon
Express.TheoperationoftheMarathonExpressiscoveredforbothnormalconditionsand
emergencyconditions.
NOTE: ThischapterprovidesoperationinstructionsfortheMarathonExpress
platformonly.Foroperationinstructionsrelatedtothecomponentsofthesystem,
refertotheappropriateusermanuals.
Theory of Operation
TheMarathonExpressisdesignedtotransportmaterialamongstandardSEMIMESCcompatible
material-handlingorprocessingmodulesinanultraclean,vacuumenvironmentwithminimal
contaminationofthematerial.TransportofthematerialisaccomplishedusingtheBrooks
Automationvacuumcassetteelevatorandvacuumrobot.Thischapterisintendedtogiveusersof
theMarathonExpresssystemsinformationonhowtooperatetheMXsystem.Itisnotintendedto
beacompletereferencefordevelopingtheassociatedsoftwareandhardwarenecessaryforMX
systemoperation.Thedetailsofoperationareconfiguredbytheuserfortheirspecificapplication.
MaterialisintroducedintotheMarathonExpressthroughtheVCEVacuumCassetteElevators.
Thesemodulesallowupto25substratestobeloadedatonetimeintothevacuumenvironment
usingSEMIstandardwafercarriers,readyforsinglewaferprocessingthroughtheMarathon
Express.
OnceawafercarrierisplacedintotheVCE,theVCEisclosedandpumpeddowntothevacuumset
point.TheVCEthenmapsthewafersinthecarrierandprovidestheinformationtothehost
controller.Thisensurespickingofproperlyplacedwafersonly.
TheslotvalveisopenedandtherobottakesonewaferfromtheVCE,placesitontheRotateChuck
oftheVacuumAligner,andtheslotvalveisclosed.Thewaferisalignedandthefiducialis
positioned.TheMagnaTran7robotpicksthewaferfromthealignerusingthehostcontroller
specifiedoffsettocenterthewaferontheendeffectorandplacesitintoaProcessModule.
Copyright © 2023, Brooks Automation, Inc.
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