Brooks Marathon Express - Frame Assembly

Brooks Automation 4. Subsystems
Part Number: 605914 Rev. B Transport Chamber
Crush Hazard / Pinch Point
Thechamberlidcanweighupto49.2kg(108.4lb).Personalinjurycouldresultinthe
squeezingorcompressionofheadorarmswhenperforminganyserviceinsideofthe
chamberduringthelidisraised.
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Personnelshouldnotplacetheirheadorarmsintothechamberwithoutprovidingan
additionalbracetothelidincaseoflifterfailure.Refertothe"LidLockout/Tagout
Procedure"onpage43.
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Personnelshouldnotplacetheirheadorarmsintothechamberwithoutverifyingplunger
inlidlifterisfullyengagedinopenpositionincaseoflifterfailure.Theonlytwo
acceptablepositionsforthelidarefullylowered,orfullyraised(90°).
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Frame Assembly
TheMarathonExpressframeisusedtosupporttheVacuumTransportChamber,theVacuum
CassetteElevatormodules,peripheralmodules(upto100kg(220lb)permodule),variousvacuum
systemcomponents(e.g.,pumps,gauges,andvalves)andthefacilitiesinterfacesassociatedwith
theMXsystem.TheframemeetsSEMIstandardE21requirements.
Theheightoftheframeissuchthattheheightofthechamber’sWTPabovethefacilityfloorwhen
mountedontheframeconformstotheSEMIMESCclustertoolspecification(1100mm(43.31in)).
Theminimumoverturningmomentis800lb-ftappliedtoanyProcessModulefacet.
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TheMarathonExpressframeisprovidedwith3removablecastersforrollingthechamberand
frametoitsdestination.Built-inforktubesallowmovingtheframewithaforklift.Thesystemdesign
allowsaccesstotheforktubesforpositioning.
TheframeisalsoequippedwithadjustablefeetallowingadjustingandlevelingoftheVacuum
TransportChamber.Seismichold-downforfacilitiesrequiringearthquakeprotectionarethe
responsibilityoftheuser.See"InstallingtheTie-downBrackets"onpage66.Serviceaccessis
providedbetweentheVacuumCassetteElevators,underthechamberbehindtheVCEs,and
betweentheProcessModules,refertoFigure1-3onpage26andFigure1-4onpage26.
Copyright © 2023, Brooks Automation, Inc.
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