Brooks Automation 4. Subsystems
Part Number: 605914 Rev. B Transport Chamber Heating System
Figure 4-7: Cartridge Heater Styles
Temperature Controller
TheTemperatureController,showninFigure4-8,providesasingle-channeldualdisplaycontroller
forusewithDeviceNetthatoffersmanyadvancedfunctions.Thereisoneuniversalsensorinput,a
secondauxiliaryinput,andtwooutputs.Thecontrollerprovides6.5Hzsampling,variabletimebase
burstfiringoutputs,NEMA4Xfrontpaneland0.1%calibrationaccuracy.
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