Brooks Marathon Express - Required Tools and Test Equipment; Configuration and Alignment Strategy; Teach the Robot the Aligner Station

8. System Alignment Marathon Express
Teach the Robot to the TopLigner
Vacuum Aligner
Part Number: 605914 Rev. B
Required Tools and Test Equipment
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CDM(Control/DisplayModule)
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AcomputerrunningaterminalemulatororadumbterminalandaserialI/Ocable
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MicroToolDummyWaferortestmaterialoftheappropriatesize
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BrooksRobot/Aligneralignmentfixture
Configuration and Alignment Strategy
ConfiguringthesystemrequiresconfiguringtheMagnaTran7robottoworkwiththeVacuum
Alignerandteachingtherobotthealigner’slocation.Oncetaught,theTopLignerbecomesthe
referencepointforallotheralignmentswithintheMarathonExpress.Refertotherobotmanualfor
detailedinformationonusingtheCDMandteachingstations.
Fortheprocedureprovidedbelow,thefollowingconfigurationisassumed:
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TopLignerisStation7fortherobot
Teach the Robot the Aligner Station
Automatic Movement / Crush hazard
WheneverpowerisappliedtotheMarathonExpress,thepossibilityexistsofautomatic
movementthatcancauseseriousinjuryordeath.Thesecomponentsinclude:
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Robot
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Aligner
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CoolModulePoppet
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LoadLockModule(s)(AutoDoor,Arm,Platform)
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AtmosphericDoors
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VacuumSlotValves
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IsolationValves
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Pumps
Movingmechanismsdonothaveobstructionsensorsandcancauseseriouspersonal
injuryordeath.
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DonotoperatetheMarathonExpresswithouttheprotectivecoversinplaceandall
safetyinterlocksenabled.
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Donotoperatetherobotwithouttheprotectivecoversinplace.
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DonotoperatetheVacuumSlotValvesorAtmosphericDoorswhenthechamberlidis
open.
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AlwaysverifyproperoperationoftheCDME-Stopbuttonbeforeperforminganyteachproceduresbypressingthe
E-Stopbuttonandverifyingthatthearmisnolongerpoweredandthatwhilethebuttonisdownnomotion
commandsareaccepted.
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