Brooks Marathon Express - Troubleshooting; Initial Troubleshooting

Brooks Automation 10. Troubleshooting
Part Number: 605914 Rev. B Initial Troubleshooting
10. Troubleshooting
TroubleshootingproblemsthatmightoccurwiththeBrooksAutomationMarathonExpress400isa
twostepprocess.Thefirststepistheinitialtroubleshooting,whichisusedtodeterminethegeneral
areawheretheproblemexists.Thesecondstepistoisolatetheproblemwithinthespecificarea
identifiedduringtheinitialtroubleshooting.
Initial Troubleshooting
ThissectioncoverstheinitialdeterminationoftheproblemareawithintheMarathonExpress400
andprovidesdirectiontothesecondstepofthetroubleshootingprocess.Ifaspecificproblemis
suspectedrefertothatprobleminTable10-1.Iftheproblemhasnotbeenidentifiedrevieweach
stepofTable10-1,nomatterhowtrivial,inordertoensureproperdeterminationoftheproblem
area.Iftheproblemencounteredisnotcoveredhere,refertotheindividualusermanualsforthe
componentswithinthesystem.
Thissectionprovidesalistofcommonlyencounteredproblemsandtheappropriatesolutionfor
eachproblem.Refertotheindividualcomponentmanualsforadditionaltroubleshooting
procedures.
Symptom Possible Problem Area
Powerlightsdonotturnon
ElectricalsystemsSystempoweredbutnoresponsetoHostController
Systempoweredbutnoresponsefromcomponentswithinsystem
LoadPortModulesnotoperating
"MaterialTransport"Unexpectedmovementofmodules
Materialslippingorleftonendeffector
Waferslippingonaligner
VacuumAligner
Alignernotworkingproperly
Table 10-1: Initial Troubleshooting
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