Brooks Marathon Express - Heating System

Brooks Automation 6. Operation
Part Number: 605914 Rev. B Control/Display Module (CDM) Operation
Control/Display Module (CDM) Operation
Refertotheappropriaterobotusermanualformoreinformation.
DC Power Supply
Refertotheappropriaterobotusermanualformoreinformation.
Heating System
TheMarathonExpressoffersanElectricHeatingSystemoptionforsystemsthatrequirechamber
heating.TheElectricHeatingSystemisbuiltintotheMXsystemchamberwiththeHeaterPower
SupplyandControllerdedicatedtothatsystem.
Theheatingsystemisusedintherapidheatingofthechamberafterservice.TheMarathonExpress
heatersystemoptionofferstwomodesofheatingoperation:BakeoutandContinuous.Referto
"BakeoutHeating"and"ContinuousHeating"inthissectionfordetailedinformation.
TheheatersystemmaybecontrolledbythehostcontrollerthroughtheFacetNodeBreakoutboxat
ProcessModule2usinggeneralpurposeRS-232/RS-422inputMISCINPUTSJ6.
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Extreme Temperature
Surfacesheatedduringsystembake-outcanreachtemperaturesof121°C(250°F),
whichcouldcausesburnswhenincontactwithskin.
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Oncesystemheatinghasbeenstarted,allpersonnelmustkeepawayfromthesystemto
avoidpossibleburninjuryduetohightemperatures.
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AllowtimefortheMarathonExpresstocoolbeforeservicingoroperating.
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DoNOToperatetherobot,vacuumaligner,oranyothercomponentsintheMarathon
ExpressSystemduringbakeout.
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Copyright © 2023, Brooks Automation, Inc.
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