Brooks Marathon Express - Pad Cleaning Procedure

Brooks Automation 9. Maintenance and Repair
Part Number: 605914 Rev. B Pad Cleaning Procedure
Unauthorized Service
Personalinjuryordamagetoequipmentmayresultifthisproductisoperatedorserviced
byunauthorizedpersonnel.
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Onlyqualifiedpersonnelareallowedtotransport,assemble,operate,ormaintain
theProduct.
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Properlyqualifiedpersonnelarethosewhohavereceivedcertifiedtrainingand
havetheproperqualificationsfortheirjobs.
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Parts
BrooksAutomationcanprovideallpartsrequiredforPreventiveMaintenance.Foralistofthese
parts,contactBrooksAutomationCustomerSupport.Toobtainadditionalinformationaboutparts
forpreventivemaintenance,contactthelocalBrookssalesrepresentative,orcallBrooks
AutomationCustomerSupport.SeeContactUsformoreinformation.
Pad Cleaning Procedure
Collectionofdebrisandothercontaminantsonthematerialsupportpadsurfacemaycausematerial
slippage.Foroptimumrobotandsystemperformance,padsshouldbecleanedasapartofnormal
servicingtoremovecontaminatesdepositedonthemfromtheprocessorothersources.
ProcedureCategory
Type1Procedure:Equipmentisfullyde-energized.
RequiredTools
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Kalrez®pads:usede-ionizedwater
StainlessSteelpads:useIsopropylAlcohol
Quartzpads:useIsopropylAlcohol
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Lint-free,cleanroomWipes
MaintenanceStrategy
Cleaningproceduresdependonthetypeofpads;Kalrez,StainlessSteel,orQuartz.Separate
proceduresareprovidedforeachsupporttype.Turnoffanddisconnectallpower,communications,
andairconnectionsasdetailedin"Shut-down"onpage1.
Copyright © 2023, Brooks Automation, Inc.
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