Brooks Marathon Express - Gas System

Brooks Automation 4. Subsystems
Part Number: 605914 Rev. B Gas System
allpneumaticallyoperatedsubsystems.LocatedintheframebelowtheMagnaTran7orLEAP
robot,thePneumaticFacilitiesInterfaceiseasilyaccessibleforservice.
SeeSystemBlockDiagramandthecontrolsmanualformoreinformation.
Gas System
TheMarathonExpressframeassemblyincludesagasfacilitiesinterface.Thisprovidesa
centralizedconnectionfortheClusterTooltonitrogenandargonsuppliedbythefacility.Locatedon
theframe,belowthechamberneartheLoadLocks,theFacilitiesInterfaceiseasilyaccessiblefor
service.
TheGasFacilitiesPanelusesoneDigitalPressureSwitchformonitoringtheflowandindicatingthe
pressureofthefacilitysuppliednitrogenandanotherDigitalPressureSwitchformonitoringtheflow
andindicatingthepressureofthefacilitysuppliedargon.
Figure 4-3: Gas Distribution Panel
RefertotheSystemBlockDiagramandVacuumandVentDiagramssuppliedwiththismanual.
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