Brooks Marathon Express - Lid Open; Emergency off (EMO) Circuit

6. Operation Marathon Express
Safety Interlocks Part Number: 605914 Rev. B
Automatic Movement / Crush hazard
WheneverpowerisappliedtotheMarathonExpress,thepossibilityexistsofautomatic
movementthatcancauseseriousinjuryordeath.Thesecomponentsinclude:
l
Robot
l
Aligner
l
CoolModulePoppet
l
LoadLockModule(s)(AutoDoor,Arm,Platform)
l
AtmosphericDoors
l
VacuumSlotValves
l
IsolationValves
l
Pumps
Movingmechanismsdonothaveobstructionsensorsandcancauseseriouspersonal
injuryordeath.

DonotoperatetheMarathonExpresswithouttheprotectivecoversinplaceandall
safetyinterlocksenabled.

Donotoperatetherobotwithouttheprotectivecoversinplace.

DonotoperatetheVacuumSlotValvesorAtmosphericDoorswhenthechamberlidis
open.

Lid Open
TheLidOpenandDoorOpenInterlocksuseacodedmagneticswitchtodetectthepresenceofthe
transportchamberlidandtheVCEdoorintheclosedposition.
TheLidOpenInterlockmaybebypassedbyusingaservicekeywithamatchingcodedmagnet.
Thekeyisdesignedtopreventthelidfrombeingclosedwhileitisinstalled.Ensuretheservicekey
isremovedandthelidisproperlyclosedbeforereturningtheMXsystemtooperation.
NOTE: AttemptingtopumpdownthetransportchamberorVCEwhileopenwiththe
servicekeyinstalledmaydamagethepumpsorothervacuumcomponents.
Emergency Off (EMO) Circuit
Typically,ausersuppliedEMObuttonwillbeconfiguredsuchthatpressingitwillremoveallpower
fromtheMarathonExpressandallattachedcomponents.Oncetheemergencyisresolved,which
canincludedeterminingthereasonfortheemergencyandcheckingthestationinvolvedduringthe
emergency,powercanberestoredtotheMXsystemandallattachedcomponents.Withpower
restoredtherobotandallattachedcomponentsshouldbere-initialized,thenprocessingcanbe
restarted.
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