Brooks Marathon Express - Repair Procedures

Brooks Automation 9. Maintenance and Repair
Part Number: 605914 Rev. B Repair Philosophy
Repair Philosophy
IftheMarathonExpressmalfunctions,referto"Troubleshooting"inthismanualfordiagnostic
procedures.Iftheseproceduresarenotadequatetodeterminethesourceoftheproblem,referto
theoperationaldescriptionsin"Subsystems"forin-depthdescriptionsofthevarioussubsystemsof
theMXsystem.Oncethefailedunitorparthasbeenidentified,aFieldReplaceableUnit(FRU)can
beordered.TheFRUisshippedwithdirectionsforremovingthefailedunitfromtheMarathon
ExpressandinstallingthenewunitintotheMXsystem.Refertotheappropriatecomponentuser
manualsforadditionaltroubleshootingandrepairprocedures.
AseriesofFRUs,shownin"FieldReplaceableUnits",hasbeenidentifiedfortheMarathonExpress
toreduceMTTRandtosimplifyrepairproceduresinthefield.SomeoftheseFRUsmaycomprisea
completeassembly.AnumberofalternativesareavailableforobtainingreplacementFRUsand
otherpartstorepairtheMarathonExpress.Thefollowingserviceoptionsareavailable:
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Facilitatedon-siterepairviaaServiceSalesOrderutilizingBrooks’FieldServicepersonnelandfactory
authorizedrepairparts
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AdvancedExchangeUnitscanbeestablishedforallmajorsystems
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Brooks’FactoryRepairServices
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BrookssparepartscanbeorderedfromBrooksCustomersupportonbothapriorityandnonpriority
basis
ContactBrooksAutomationTechnicalSupportformoreinformationorquotes.SeeContactUsfor
moreinformation.
NOTE: SafetyandOperationstrainingclassesonhowtotroubleshootandrepaira
MarathonExpresstoaFRUlevelareavailable.ContactBrooksAutomationfor
informationabouttheseclasses.
Repair Procedures
Thefollowingrepair/replacementprocedureswillprovidetheinformationrequiredforstandarduser
servicingoftheBrooksAutomationMarathonExpress.Ifadditionalproceduresarerequiredduring
theperformanceofanyprocedure,theywillbespecified.Refertotheindividualcomponent
manualsandanyseparaterepairproceduresprovidedwiththeindividualsystemcomponentsfor
additionalrepairprocedures.
Wafer Change-Over Procedure
TheMarathonExpressiscapableofoperationwith100mmthrough200mmwafers.Thereare
minimalchangesrequiredtoconvertfromonewafersizetotheother.
ProcedureCategory
Type1Procedure:Equipmentisfullyde-energized.
Copyright © 2023, Brooks Automation, Inc.
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