Brooks Marathon Express - Page 188

9. Maintenance and Repair Marathon Express
Repair Procedures Part Number: 605914 Rev. B
RequiredTools
l
MetricHexWrenches
l
Acomputerrunningaterminalemulatororadumbterminal
l
Therobot’sControl/DisplayModule(CDM)
MaintenanceStrategy
ThefollowingchangesmustbemadetotheMarathonExpresssystem’shardwareandsoftware
whenchangingwafersizes.Turnoffanddisconnectallpower,communications,andair
connectionsasdetailedin"Shut-down"onpage1.
NOTE: Afteranychangesaremadetothesystem(includingthesizeofthewafer),the
systemshouldbecompletelyrealigned,asdescribedin"SystemAlignment".

TheMarathonExpressmaybeusedinanenvironmentwherehazardousmaterials
arepresent,andsurfacesmaybecontaminatedbythosematerials.Refertothe
facility’sMaterialSafetyDataSheetsforthosematerialstodetermineproper
handlingandfollowthefacility’sprocedurestocertifytheenvironmentissafe.

Disposeofcleaningclothsperthefacility’sproceduresandlocalregulations.

Lockout / Tagout
Workingwithenergizedequipmentmaycausesuddenmovementorelectricalshockand
mayresultindeathorseriousinjury.
l
Allenergymustberemovedfromtheequipmentperthefacility’s
Lockout/Tagoutprocedurebeforeservicing.
l
Iflocalproceduresarenotavailable,followtheprocedureforLockout/Tagoutin
OSHA Standard 29CFR 1910.147.

188
Copyright © 2023, Brooks Automation, Inc.