3. Installation Marathon Express
Installation Procedure Part Number: 605914 Rev. B
Remove Protective Packaging
ThemodulesoftheMarathonExpressareshippedwiththeirinternalcomponents(robot,aligner,
etc.)coveredinprotectivepackaging.Thispackagingmustberemovedbeforeinstallationcanbe
started.
MarathonExpressModule
Removeprotectivewrappingfromanyloosecableendsorconnectors.
VCEModule(s)
Removeprotectivewrappingfromanyloosecableendsorconnectors.
RackMountableEquipment
Removeprotectivewrappingfromanyloosecableendsorconnectors.
Removing Shipping Brackets
ThemodulesoftheMarathonExpressareshippedwithshippingbracketsattachedtothem,which
protecttheirmovingpartsandprovideeaseofmovementofthemodules.Theseshippingbrackets
mustberemovedbeforetheMXsystemmaybeinstalledorused.
NOTE: Savetheshippingbracketsforpossiblefutureuse.Ifanyofthemodulesofthe
MarathonExpressarereturnedtoBrooksforserviceorshippedtoanotherlocation,
theoriginalshippingbracketsmustbeused.RefertoAppendixF:"Packingand
ShippingInstructions"onpage224.
MarathonExpressVacuumBackEnd
Therobotarmsaresecuredinplaceforprotectionduringshipment.Theseshippingbracketsmust
beremovedbeforeattemptingtooperatetherobot.
Step Action
1.
Removeallmountingboltssecuringthelidtothechamber.
2.
Raisethelidfromthetopofthevacuumchamberbyturningthewheelonthelidlifter.Refertothe"Lid
Lockout/TagoutProcedure"onpage43.
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