Brooks Marathon Express - Initializing the Topligner; Initializing the Topcooler; Initiating the CDM; Opening the Chamber Lid

8. System Alignment Marathon Express
System Preparation Part Number: 605914 Rev. B
NOTE: ThisprocedureassumesthatbothloadlocksareconnectedtotheTransport
Chamberpriortoadjustmentandthatpreliminarylevelingofeachcomponentandthe
TransportChamberhavebeencompleted.
Initializing the TopLigner
ThemechanicalportionofthesystemalignmentisnotdirectlyaffectedbytheTopLignerVacuum
Aligner.However,therobotwillneedtobetaughtthelocationofthealigner’sChucktoallowplacing
wafersforalignment.NotethatuseofanalignerduringtheWaferAlignmentPhaseofsystem
alignmentallowsthealignmenttobe“finetuned”forimprovedaccuracy.Setupproceduresforthe
alignerarecoveredinthesystemalignmentprocedureslaterinthischapter.
Initializing the TopCooler
ThesystemalignmentprocedureisnotdirectlyaffectedbytheBrooksAutomationTopCooler.
However,therobotwillneedtobetaughtthewaferplacementlocationwithinthecooler.Setup
proceduresforthecoolerarecoveredinthesystemalignmentprocedureslaterinthischapter.
Initiating the CDM
Verifythatallsetupproceduresintherobotmanualincludingarminstallationhavebeencompleted.
Somestepsmayhavebeenperformedatthefactorypriortoshipment.
PerformingasystemalignmentontheMarathonExpressrequiresmovingtherobotarmand
enteringstationcoordinatesorotherrobotparametersintotherobot'smemory.Thisismost
convenientlydoneusingtherobot'shand-heldControl/DisplayModule(CDM)suppliedwiththe
robot.Beforetherobot'sCDMcanbeused,itmustbeconnectedtotherobot.Followtheprocedure
forconnectingandinitiatingtheCDMintherobotmanual.
Opening the Chamber Lid
Ifthevacuumrobothasnotbeentaught,theTransferChamberLidmaybeopenedtoallowaccess
totheendeffectorsandallowvisualverificationofthestationassignments.
ToopentheLid,followtheprocedure"LidLifterOperation"onpage123.
ToremovetheLid,cyclethesystemtomanualmode.
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