Brooks Marathon Express - Environmental Specifications

1. Introduction Marathon Express
Specifications Part Number: 605914 Rev. B
Specification Value
BaseVacuum
5x10-8Torrwithcryo/turbopumpingsystem
5x10-7Torrwithturbopumpingsystem
LeakRate 1.0x10-8Torr-l/secHemax.
WorkingPressure
-15psivacuum
+1psioverpressure
ReliefPressure 1-3psi
CassettemapPeriod 20seconds(typical)
LaserLight Class1Laser(usedinwafermappers)
WaferSensing
Sensors:Polar-reflectivebeambreak,bottommount
Sensorradius:364.0mm(14.32in)
VacuumAlignerModules
Alignmentmode:rotary
Alignmenttime:4.8sec(wafer)9-13.8sec(squaresubstrate)
WaferCoolerModule
ThermalTransferGas:Argon,Nitrogen(factory)optional
GasDeliveryPressure:20psimax
GasConsumption:2cc/cycleatregulatorpressure
IntegralWaferBufferStation Capacity:4wafersat5.5mm(0.22in)pitch
BufferStation
Capacity:4wafersat6.0mm(0.236in)pitch
Volume:Approximately4.5liters(276in
3
)
SmallVolumeLock
Mounting:Facetmountwithslotvalveandatmosphericdoor
Volume:Approximately12.0liters(732in
3
)

Environmental Specifications
ISO14644-1ClassISO6orbettercleanroomambient.
Specification Value
Temperature
Operating:20°Cto30°C(68°Fto86°F)
Shipping:-25°Cto55°C(-13°Fto131°F),upto65°C(149°F)for24hrs.max
Storage:-25°Cto55°C(-13°Fto131°F),upto65°C(149°F)for24hrs.max
Humidity 30%to55%(relative,non-condensing)
Lighting
StandardlightingprovidedinthecleanroomenvironmentwheretheMarathonExpressis
installedissufficientforproperoperation.Maintenancemayrequireauser-suppliedservice
light(i.e.,flashlight).
Table 1-2: Environmental Specifications
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