Brooks Marathon Express - Specifications

Brooks Automation 1. Introduction
Part Number: 605914 Rev. B Specifications
Specifications
TheBrooksAutomationMarathonExpressisahighreliabilityintegrationplatformsupportingupto6
ProcessModulesand2LoadLockModules.ThespecificationsfortheMarathonExpressandits
subsystemsaredetailedbelow.
NOTE: AllspecificationsareforthestandardMXsystemconfiguration,specifications
canvaryforcustomizedconfigurations.

Operating Specifications
Specification Value
RangeofMotion
960.0mm(37.80in)nominalendeffectorextensionbeyondtoolat
centerofallprocessmodulefacets(towafercenter)
NOTE: ThesedimensionsareforstandardMXsystem
configurations,dimensionscanvaryforcustomized
configurations
MaximumNoiseLevel 55dB(A)
TransportPlane
900mmatVCEplatform(SEMIstandard)
1100mm(43.31in)perSEMIE21atProcessModuleside
(3.78mm(0.15in)aboveslotcenterline)
MaterialSizes(wafers)
100mm
25mm
150mm
200mmwithorwithoutnotchedfiducialperSEMIM1
MaterialSizes(substrates)
100mmsquare
125mmsquare
150mmsquare
MaterialWeight
400gmaximumwithBiSymmetrikarms
200gmaximumwithLeapfrogarms
MaterialThickness
6mmmaximumwithBiSymmetrikarms
3mmmaximumwithLeapfrogarms
MaterialTransparency 0to96%
VacuumChamberVolume(typicalvalues
shown,canvarybasedonconfiguration):
MX800:Approximately117.7liters(7,184in3)
MX700:Approximately117.1liters(7,150in3)
MX600:Approximately69.0liters(4,212in3)
VCE6:Approximately50.0liters(3,051in3)(each)
Table 1-1: Operating Specifications
Copyright © 2023, Brooks Automation, Inc.
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