Brooks Marathon Express - Heater Power Supply

Brooks Automation 4. Subsystems
Part Number: 605914 Rev. B Transport Chamber Heating System
Thermocouple.ThissystemheatstheTransportChamberwhilemonitoringthetemperatureofthe
chamber.
Extreme Temperature
Surfacesheatedduringsystembake-outcanreachtemperaturesof121°C(250°F),which
couldcauseburnswhenincontactwithskin.

Allowtimeforthesystemtocoolbeforeservicingoroperating.
Heater Power Supply
TheHeaterPowerSupply,showninFigure4-5,israckmountable.Thepowersupplyprovides
powerdistributiontotheHeaterCartridgeassemblies,theTemperatureController,theThermal
Switch,andtheThermocouple.TheHeaterPowerSupplycontainspowercontrol,switching,and
overtemperaturecutoutcircuits;maximumBakeouttemperatureisfixedbyasafetythermo-switch
onthechamber.
TheHeaterPowerSupply,designedbyBrooksAutomation,usesaWatlowTemperatureController
toregulatetheTransportChambertemperature.The24Vcontrollercontrolsoperationoftheheater
systemviacommunicationsfromthehostcontroller.TheTemperatureControllerismountedinthe
LowerFacilitiesBayontheMXsystem’sframe.
Figure 4-5: Heater Power Supply
Copyright © 2023, Brooks Automation, Inc.
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