Brooks Marathon Express - Teach the Robot the Process Modules

Brooks Automation 8. System Alignment
Part Number: 605914 Rev. B Teach the Robot the Process Modules
Step Action
1.
Usingtherobot’sCDM,teachtherobottheR,T,andBTOvaluesforthefirst(lowest)slotintheWafer
BufferStation:
SETUP -> STATIONS -> n -> CR -> LEARN R, T, BTO -> HAND LOCATE
(wherenisthestationnumberfortheWaferBufferStation)
a. Manuallymovetherobot’sendeffectorwithatestwaferproperlycenteredonit(bythealigner)
intothefirst(lowest)slotoftheWaferBufferStation,adjustingZasnecessarysothewafer
clearsthewafersupports(1.5mm(0.06in)minimum).
b. OncetheendeffectorispositionedcorrectlysavetheR,T,andBTOvaluesfortherobotusing
theCDM.
ESCAPE -> STORE -> R -> T -> BTO -> QUIT
2.
Teachtherobottheamountitmusttraveldowntodepositthewaferandprovidetheendeffector
clearancewhilemovingunderthewafer.
SETUP -> STATIONS -> n -> CR -> LEARN LOWER -> JOG
(wherenisthestationnumberfortheProcessModule)

Jogthewaferdownintopositionandcontinuejoggingdownsotheendeffectoris1.5mm(0.06in)
belowthewafer.
3.
OncethewaferandendeffectorarepositionedcorrectlysavetheLowervalueusingtheCDM.
ESCAPE -> STORE -> L -> QUIT
4.
Assigntheremainingstationvalues.
SETUP -> STATIONS -> 1 -> CR -> ASSIGN LOCATION -> SLOT -> 4 -> CR -> P ->
5500 -> CR -> QUIT
5.
RecordtheStationcoordinatesintheappropriateworksheetprovidedinAppendixC:"StationIden-
tification"onpage221.

TeachingthevacuumrobotthecoordinatesoftheWaferBufferStationisnowcomplete.Return
controloftherobottothehostcontrollerandshutofftheCDM.
Teach the Robot the Process Modules
ThefollowingprocedureteachestherobottheProcessModulestations.Notethatthisprocedureis
forusewithMarathonExpresssystemsrunningWAVEIISoftware.
NOTE: Itmaybehelpfultouseaglasswaferwithcross-hairsscribedintoittolocate
thecentersoftheProcessModulestations.
Thestationsreferencedhereareforastandardconfiguration.Actualstation
assignmentsmayvarybasedonthesystemconfiguration.
Changingstationassignmentsmaycauseinterlockstobeignored.Changingthe
stationnumbersrequiresreconfigurationofallstationoptions.
Copyright © 2023, Brooks Automation, Inc.
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