Brooks Automation 3. Installation
Part Number: 605914 Rev. B Power-up Sequence
MagnaTran7orLEAProbot,arecapableofEthernetcommunicationasanoption.Thetypeof
connectionsuseddependsonthegenerationofthecontrolsystemimplementedontheMXsystem.
SeeSystemBlockDiagramandthecontrolsmanualformoreinformation.
Power-up Sequence
ThefollowingproceduredescribesthestepstosafelyapplypowertotheMarathonExpresssystem
andverifythatitisreadyforoperation.
Automatic Movement / Crush hazard
WheneverpowerisappliedtotheMarathonExpress,hepossibilityexistsofautomatic
movementthatcancauseseriousinjuryordeath.Thesecomponentsinclude:
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Robot
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Aligner
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CoolModulePoppet
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LoadLockModule(s)(AutoDoor,Arm,Platform)
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AtmosphericDoors
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VacuumSlotValves
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IsolationValves
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Pumps
Movingmechanismsdonothaveobstructionsensorsandcancauseseriouspersonal
injuryordeath.
DonotoperatetheMarathonExpresswithouttheprotectivecoversinplaceandall
safetyinterlocksenabled.
Donotoperatetherobotwithouttheprotectivecoversinplace.
DonotoperatetheVacuumSlotValvesorAtmosphericDoorswhenthechamberlidis
open.
Step Action
1.
Checktoensurethatalloftheinstallationprocedurespreviouslydescribedinthischapterhavebeen
completed.
2.
OperationalSafetyandInterlockChecks:
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EnsurethattheVCE’sdoorsareclosed.
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EnsurethattheMarathonExpressvacuumchamberandloadlocklidsareclosedandsecured.
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IfanE-Stopbuttonisbeingusedwiththesystem,ensurethattheE-StopJumperPlughasbeen
removedfromtheSafetyHubandtheE-StopButtonhasbeenpluggedin.
Copyright © 2023, Brooks Automation, Inc.
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