Brooks Marathon Express - Integral Wafer Buffer Station

4. Subsystems Marathon Express
DeviceNet Part Number: 605914 Rev. B
DeviceNet
RefertotheSystemBlockDiagramandthecontrolsmanualformoreinformation.
TopCooler
RefertotheVXTopCoolerUserManualformoreinformation.
TopLigner Vacuum Aligner
Refertothealignermanualformoreinformation.
Integral Wafer Buffer Station
TheoptionalIntegralWaferBufferStationislocatedinsidethetransportchamberbetweentheload
lockports.Thisstationiscompletelypassivecontainingfourcloselyspacedslotsforwaferstorage.
Therobot’sZ-axismotionissufficienttoaccesstheindividualwafers.Innormaloperation,thewafer
bufferstationisusedtostorecleanwafersformodulesthatrequireperiodiccleancyclesbetween
productionwafers.
ThehostcontrollertrackstheplacementhistoryofthewaferswithintheWaferBufferStation.The
materialsensorsateachfacetwilldetectifthewaferhasbeenpickedupfromthewaferbuffer
stationwhenplacingtoaprocessmoduleorloadlock.
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