Brooks Marathon Express - Cleaning Procedure

Brooks Automation 9. Maintenance and Repair
Part Number: 605914 Rev. B Cleaning Procedure
Step Action
3.
CleaningStainlessSteelorQuartzPadsProcedure:
a. Dampenacleanroomwipewithisopropylalcohol.
b. Cleantheentireendeffectororsupportshelf,payingspecialattentiontothepads.Donot
applyexcessivepressureorforcetothepadswhilecleaning.Excessiveforcemaybendthe
endeffectororshelf.
c. Onceallcontaminantshavebeenremoved,usecleanroomwipesmoistenedwithDIwaterto
removeanyresidues.
d. Onceallresidueshavebeenremoved,usedrycleanroomwipestodryallsurfaces.
NOTE: Wipemustbemoistenedonly;squeezingthewipeshouldnotcauseanywatertodrip.Do
notallowwatertocomeincontactwithbearings,seals,etc.Alcoholshouldnotbeusedonthe
optionalperfluoroelastomer(Kalrez)pads.
NOTE: Wipemustbemoistenedonly;squeezingthewipeshouldnotcauseanywatertodrip.Do
notallowwatertocomeincontactwithbearings,seals,etc.
4.
EnsuretheLoadLockdoorandtheTransportChamberlidareclosed.
5.
Reconnectallpower,communications,andairconnections,thenre-energizethesystemfollowing
the"Power-upSequence"onpage79.
Cleaning Procedure
OccasionallytheMarathonExpresswillneedtobecleaned.Thiscouldbedoneasapartofnormal
servicingortoremovecontaminatesdepositedonitfromtheprocessorothersources.
ProcedureCategory
Type1Procedure:Equipmentisfullyde-energized.
RequiredTools
l
IsopropylAlcohol(100%)
l
DIWater
l
CleanroomWipes
MaintenanceStrategy
Ageneralcleaningprocedureisprovidedwithspecificdirectionsforeachofthemajorcomponents
withinthesystem.Turnoffanddisconnectallpower,communications,andairconnectionsas
detailedin"Shut-down"onpage1.
Copyright © 2023, Brooks Automation, Inc.
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