Brooks Marathon Express - Field Replaceable Units Marathon Express

11. Field Replaceable Units Marathon Express
Marathon Express Part Number: 605914 Rev. B
Marathon Express
Figure 11-1: Chamber and Frame FRUs
Number Description
1 ASSY,LIDLIFTER
2
KIT,WINDOW/BEZEL,CENTER,
LARGE
3 KIT,WINDOW/BEZEL,MX8000
4 ASSY,TRANSPORTVIEWPORTKIT
5 KIT,BLANKOFF,1/2MESCFACET
6
VALVE,SLOT,MONOVAT,
RECTANGULAR,200MM,W/DB9
CONN
208
Copyright © 2023, Brooks Automation, Inc.