Brooks Marathon Express - Teach the Marathon Express Stations for Material Transfer

Brooks Automation 8. System Alignment
Part Number: 605914 Rev. B Overview
Step Action
2.
Verifythedipandtwistofallendeffectorsiswithinspecificationsandmakeanynecessarycorrections
oradjustments.Referto"AdjustingtheRobot’sEndEffector(s)"onpage185.
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ConfiguretheRobot
Configuretherobot,bysettinguptheoperatingparameters,forproperoperationwithinthe
MarathonExpress.
TeachtheMarathonExpressStationsforMaterialTransfer
Therobot’ssoftwareusesastationcoordinatesystemforidentifyingspecificlocations.By
identifyingphysicallocationsinthismanner,itisonlynecessarytoprovidetherobotwiththestation
numberinsteadofthecompletecoordinateseteachtimeacommandisissuedtotherobot.Multiple
stationnumbersmaybeassignedtoasinglephysicallocationforlogisticalpurposes.
Teach the Robot the TopLigner Vacuum Aligner Location
TheTopLignervacuumaligneractsasthecenterpointofwafertransfersthroughtheMarathon
VacuumTransportSystem.Theyareusedtoorientthefiducialofallwafers,andmaybeusedto
assistincenteringthewaferontherobot’sendeffector.Toensureproperhandoffofthewafer
betweentherobotandthealigner,thealignerstationmustbetaughttotherobot.Referto"Teach
theRobottotheTopLignerVacuumAligner"onpage151forinstructionsonteachingthevacuum
alignerstation.
Teach the Robot the TopCooler Location
TheTopCoolerwafercoolerprovidescoolingforhotprocessedwaferswithintheMarathonExpress
VacuumBackEndbeforetheyarereturnedtothecassette.Toensureproperhandoffofthewafer
betweentherobotandthecooler,thecoolstationmustbetaughttotherobot.Referto"Teachthe
RobotwiththeTopCooler"onpage154forinstructionsonteachingthewafercoolerstation.
Teach the Robot the Load Lock Locations
TheVCELoadLocksprovidetheinterfaceforwafertransferfromtheatmosphericenvironment.To
ensureproperhandoffofthewaferbetweentherobotandthecassettesintheLoadLockstheVCE
mustbeconfiguredandtheLLstationsmustbetaughttotherobot.Referto"VacuumCassette
ElevatorConfigurationandAlignment"onpage156forinstructionsonteachingtheLLstations.
NOTE: ItshouldnotbenecessarytoleveltheVCEplatformunlessthisisanew
installation,aVCEisbeingreplaced,orthewafersizeisbeingchanged.
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Copyright © 2023, Brooks Automation, Inc.
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