Brooks Marathon Express - Page 14

1. Introduction Marathon Express
System Overview Part Number: 605914 Rev. B
VCE6VacuumCassetteElevator
TheBrooksAutomationVCEallowsSEMIstandardH-barwafercassettestobeintroducedinto,
andremovedfrom,thehigh-vacuumenvironmentoftheTransportModulewithoutdisturbingthat
vacuumenvironment.TheVCEconsistsofawafercassetteelevatingmechanismhousedinan
aluminumvacuumloadlockchamber.Theelevatorraisesorlowersacassettesothatindividual
slotsarealignedwiththesystemMaterialTransportPlaneforwafertransportbythevacuumrobot.
SeetheVCEUserManualformoreinformationontheVCE.
Seetherobotmanualformoreinformationontherobot.
VacuumAligners
TThevacuumalignersacceptrandomly-orientedwafersandrotatesthemwhilescanningfor
fiduciallocationandeccentricity.Usingtheeccentricityinformationprovidedtherobotcanthenpick
upthewaferusinganoffsettocenterthewaferontheendeffector.
WaferCoolStation
TheBrooksAutomationTopCoolerisdesignedtocoolwafersinSEMI-standard100mmthrough
200mmsizespriortofurtherprocessingorreinsertionintoacassette.Thecoolingcycleinvolves
dischargingafixedquantityofgasintotheclosedcoolchamber,whichprovidesconductiveheat
transferbetweenthegasandachillplatetocoolthewafer.
Controls
TheMarathonExpressisavailablewithseveraldifferentcontrolconfigurations.Theseconfiguration
aredescribedbrieflybelowandindetailin"ElectricalSystem"onpage97.
Configuration
TheconfigurationoftheMarathonExpressisdeterminedbytheuserandisbasedontheBasic
ConfigurationneededandtheSystemIntegrationLevelrequired.
Basic Configuration
TheBasicConfigurationoftheMarathonExpressisdeterminedbythewafersizeandthenumberof
ProcessModules(PMs)accommodated.
System Integration Level
TheSystemIntegrationLevelisdeterminedbytheuser’srequirementsforsystemintegrationand
controlsandisavailableinLevelsasdescribedbelow.Thismanualprovidescompletecoveragefor
thehardwareusedinallintegrationlevelsoftheMarathonExpressandthesoftwareusedthrough
theLevel2.5integratedsystems.
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